Microchip Fabrication

This book provides a complete technician-level explanation of the major issues and processes in semiconductor fabrication for non-engineers working in fabrication support functions, such as operations planning, quality control, and technical personnel. Included is thorough coverage of semiconductor materials and process chemicals, crystal growth and wafer preparation, and contamination control. There is up-to-date material on process yields, oxidation, and photolithography, as well as on doping, chemical vapor deposition, and metalization. Readers will also find invaluable coverage of wafer test and evaluation, manufacturing technology, semiconductor devices and structures, integrated circuit types, and chip packaging. Entirely updated and expanded to reflect all recent developments, this book is based on a seminar attended by over 8000 technicians and other personnel.